Silicon wafer holder

Details Silicon wafer holder Silicon wafer holder

1988-10-20

1990-07-24

Arnold, Bruce Y.

Work holders

Relatively movable jaws

Jaw features

269 97, 356244, 414786, G02B 2134

Patent

active

049431480

ABSTRACT:
A holder for positioning silicon wafers on a microscope stage for uniform and repeatable viewing under the microscope. The holder comprises a circumferential rib having an arc of from about 60.degree.-180.degree. diametrically opposed to a radially aligned slit within which a bracket member is positioned. Actuation of the bracket member pushes against a major flat on the silicon wafer, causing the leading edge of the wafer to bear against the abutment. The holder, or platen, is provided with calibration standards on a circumferential edge portion, and is also provided with at least one access port permitting access to the underside of the wafer with vacuum wands.

REFERENCES:
patent: 2333114 (1943-11-01), Meyer
patent: 2471103 (1949-05-01), Franks et al.
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patent: 4252303 (1981-02-01), Shimai
patent: 4255077 (1981-03-01), Smith
patent: 4508326 (1985-02-01), Andre
patent: 4582191 (1986-04-01), Weigand
patent: 4711438 (1987-12-01), Guarino
patent: 4789294 (1988-12-01), Sato et al.
patent: 4818169 (1989-04-01), Schram et al.

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