Silicon thin film transistors, systems, and methods of...

Details Silicon thin film transistors, systems, and methods of... Silicon thin film transistors, systems, and methods of...

2011-07-12

2011-07-12

Richards, N Drew (Department: 2895)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

On insulating substrate or layer

C438S149000, C438S164000, C438S694000, C257SE21704, C257S288000, C257SE29273

Reexamination Certificate

active

07977173

ABSTRACT:
Systems and methods of fabricating silicon-based thin film transistors (TFTs) on flexible substrates. The systems and methods incorporate and combine deposition processes such as chemical vapor deposition and plasma-enhance vapor deposition, printing, coating, and other deposition processes, with laser annealing, etching techniques, and laser doping, all performed at low temperatures such that the precision, resolution, and registration is achieved to produce a high performing transistor. Such TFTs can be used in applications such as displays, packaging, labeling, and the like.

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