Stock material or miscellaneous articles – Composite – Of inorganic material
Reexamination Certificate
2005-01-11
2005-01-11
Jones, Deborah (Department: 1775)
Stock material or miscellaneous articles
Composite
Of inorganic material
C428S408000, C428S446000, C428S620000
Reexamination Certificate
active
06841273
ABSTRACT:
The present invention provides a silicon/silicon carbide composite and having a high quality in avoiding warp or breakage and in a corrosion resistance, a durability, a heat shock resistance and particularly suitable used for semiconductor heat treatment member such as a dummy wafer or the like and a process for manufacturing a high purity silicon/silicon carbide composite containing a limited amount of carbon left without reaction. The present invention uses a silicon/silicon carbide composite comprised of 45 to 75 weight % of silicon and 25 to 55 weight % silicon carbide, said silicon carbide being formed from an assembly of fibers each having a thickness of 150 μm or less and a length of 0.8 to 3.5 mm. The present invention is directed to a process for manufacturing a silicon/silicon carbide composite which comprises a first step where cellulose fibers with a fiber thickness of 150 μm or less is heated at a temperature of 500° C. to 1500° C. in a non-oxidizing atmosphere to produce a porous carbon body with a bulk density of 0.10 to 0.80 g/cm3and a second step where said porous carbon body is silicification in an atmosphere containing silicon.
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Patent Abstracts of Japan, vol. 1999, No. 11, Sep. 30, 1999, JP 11-147779, Jun. 2, 1999.
D. Shin et al., “Silicon/Silicon Carbide Composites Fabricated by Infiltration of a Silicon Melt into Charcoal”, Journal of the American Ceramic Society, American Ceramic Society, vol. 82, No. 11, Nov. 1999, pp. 3251-3253.
Horiuchi Yushi
Li Jianhui
Yamaguchi Masahiro
Bahta Abraham
Foley & Lardner
Jones Deborah
Toshiba Ceramics Co. Ltd.
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