4. Drying and gas or vapor contact with solids
  5. Apparatus
  6. With apparatus using centrifugal force

Yushi Horiuchi

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Apparatus for manufacturing powdered silicon nitride

Drying and gas or vapor contact with solids – Apparatus – With apparatus using centrifugal force
Patent

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Method for manufacturing Si-SiC member for semiconductor...

Etching a substrate: processes – Nongaseous phase etching of substrate – Etching inorganic substrate
Reexamination Certificate

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Silicon/silicon carbide composite and process for...

Stock material or miscellaneous articles – Composite – Of inorganic material
Reexamination Certificate

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