Silicon carbide chrome thin-film resistor

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

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257358, 257379, 257380, 257536, 257904, H01L 2972

Patent

active

060810149

ABSTRACT:
A thin-film resistor is formed from silicon, carbon, and chromium. The resistivity of the thin-film resistor, and therefore the resistance and temperature coefficient of resistance (TCR) of the resistor, are tailored to have specific values by varying the elemental composition of the silicon, carbon, and chromium used to form the resistor.

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