Silicide-silicon oxide-semiconductor antifuse device and...

Semiconductor device manufacturing: process – Making device array and selectively interconnecting – Using structure alterable to conductive state

Reexamination Certificate

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C438S600000, C257SE23147

Reexamination Certificate

active

07655509

ABSTRACT:
An antifuse contains a first silicide layer, a grown silicon oxide antifuse layer on a first surface of the first silicide layer, and a first semiconductor layer having a first surface in contact with the antifuse layer.

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