Semiconductor device manufacturing: process – Making device array and selectively interconnecting – Using structure alterable to conductive state
Reexamination Certificate
2007-09-13
2010-02-02
Pham, Thanhha (Department: 2894)
Semiconductor device manufacturing: process
Making device array and selectively interconnecting
Using structure alterable to conductive state
C438S600000, C257SE23147
Reexamination Certificate
active
07655509
ABSTRACT:
An antifuse contains a first silicide layer, a grown silicon oxide antifuse layer on a first surface of the first silicide layer, and a first semiconductor layer having a first surface in contact with the antifuse layer.
REFERENCES:
patent: 3414892 (1968-12-01), McCormack et al.
patent: 3432827 (1969-03-01), Sarno
patent: 3571809 (1971-03-01), Nelson
patent: 3573757 (1971-04-01), Adams
patent: 3576549 (1971-04-01), Hess
patent: 3582908 (1971-06-01), Koo
patent: 3629863 (1971-12-01), Neale
patent: 3634929 (1972-01-01), Yoshida et al.
patent: 3671948 (1972-06-01), Cassen et al.
patent: 3699543 (1972-10-01), Neale
patent: 3717852 (1973-02-01), Abbas et al.
patent: 3728695 (1973-04-01), Frohman-Bentchkowsky
patent: 3787822 (1974-01-01), Rioult
patent: 3846767 (1974-11-01), Cohen
patent: 3863231 (1975-01-01), Taylor
patent: 3877049 (1975-04-01), Buckley
patent: 3886577 (1975-05-01), Buckley
patent: 3922648 (1975-11-01), Buckley
patent: 3980505 (1976-09-01), Buckley
patent: 3990098 (1976-11-01), Mastrangelo
patent: 4146902 (1979-03-01), Tanimoto et al.
patent: 4177475 (1979-12-01), Holmberg
patent: 4203123 (1980-05-01), Shanks
patent: 4203158 (1980-05-01), Frohman-Bentchkowsky et al.
patent: 4229757 (1980-10-01), Moussie
patent: 4272880 (1981-06-01), Pashley
patent: 4281397 (1981-07-01), Neal et al.
patent: 4419741 (1983-12-01), Stewart et al.
patent: 4420766 (1983-12-01), Kasten
patent: 4442507 (1984-04-01), Roesner
patent: 4489478 (1984-12-01), Sakurai
patent: 4494135 (1985-01-01), Moussie
patent: 4498226 (1985-02-01), Inoue et al.
patent: 4499557 (1985-02-01), Holmberg et al.
patent: 4500905 (1985-02-01), Shibata
patent: 4507757 (1985-03-01), McElroy
patent: 4535424 (1985-08-01), Reid
patent: 4543594 (1985-09-01), Mohsen et al.
patent: 4569121 (1986-02-01), Lim et al.
patent: 4630096 (1986-12-01), Drye
patent: 4646266 (1987-02-01), Ovshinsky et al.
patent: 4672577 (1987-06-01), Hirose
patent: 4677742 (1987-07-01), Johnson
patent: 4710798 (1987-12-01), Marcantonio
patent: 4811082 (1989-03-01), Jacobs
patent: 4811114 (1989-03-01), Yamamoto et al.
patent: 4820657 (1989-04-01), Hughes et al.
patent: 4823181 (1989-04-01), Mohsen et al.
patent: 4855953 (1989-08-01), Tsukamoto et al.
patent: 4876220 (1989-10-01), Mohsen et al.
patent: 4881114 (1989-11-01), Mohsen et al.
patent: 4899205 (1990-02-01), Hamdy et al.
patent: 4922319 (1990-05-01), Fukushima
patent: 4943538 (1990-07-01), Mohsen et al.
patent: 5001539 (1991-03-01), Inoue et al.
patent: 5070383 (1991-12-01), Sinar et al.
patent: 5070384 (1991-12-01), McCollum et al.
patent: 5089862 (1992-02-01), Warner, Jr. et al.
patent: 5126290 (1992-06-01), Lowrey et al.
patent: 5160987 (1992-11-01), Pricer et al.
patent: 5166556 (1992-11-01), Hsu et al.
patent: 5191405 (1993-03-01), Tomita et al.
patent: 5202754 (1993-04-01), Bertin et al.
patent: 5233206 (1993-08-01), Lee et al.
patent: 5266912 (1993-11-01), Kledzik
patent: 5283468 (1994-02-01), Kondo et al.
patent: 5306935 (1994-04-01), Esquivel et al.
patent: 5311039 (1994-05-01), Kimura et al.
patent: 5334880 (1994-08-01), Abadeer et al.
patent: 5365105 (1994-11-01), Liu et al.
patent: 5391518 (1995-02-01), Bhushan
patent: 5391907 (1995-02-01), Jang
patent: 5398200 (1995-03-01), Mazure et al.
patent: 5422435 (1995-06-01), Takiar et al.
patent: 5426566 (1995-06-01), Beilstein, Jr.
patent: 5427979 (1995-06-01), Chang
patent: 5434745 (1995-07-01), Shokrgozar et al.
patent: 5441907 (1995-08-01), Sung et al.
patent: 5453952 (1995-09-01), Okudaira
patent: 5463244 (1995-10-01), De Araujo et al.
patent: 5468997 (1995-11-01), Imai et al.
patent: 5471090 (1995-11-01), Deutsch
patent: 5481133 (1996-01-01), Hsu
patent: 5495398 (1996-02-01), Takiar et al.
patent: 5502289 (1996-03-01), Takiar et al.
patent: 5521440 (1996-05-01), Iranmanesh
patent: 5523622 (1996-06-01), Harada et al.
patent: 5523628 (1996-06-01), Williams et al.
patent: 5535156 (1996-07-01), Levy et al.
patent: 5536968 (1996-07-01), Crafts et al.
patent: 5552963 (1996-09-01), Burns
patent: 5561622 (1996-10-01), Bertin et al.
patent: 5581498 (1996-12-01), Ludwig et al.
patent: 5585675 (1996-12-01), Knopf
patent: 5640343 (1997-06-01), Gallagher et al.
patent: 5654220 (1997-08-01), Leedy
patent: 5663591 (1997-09-01), Iranmanesh
patent: 5675547 (1997-10-01), Koga
patent: 5693552 (1997-12-01), Hsu
patent: 5696031 (1997-12-01), Wark
patent: 5703747 (1997-12-01), Voldman et al.
patent: 5737259 (1998-04-01), Chang
patent: 5745407 (1998-04-01), Levy et al.
patent: 5751012 (1998-05-01), Wolstenholme et al.
patent: 5776810 (1998-07-01), Guterman et al.
patent: 5780925 (1998-07-01), Cipolla et al.
patent: 5781031 (1998-07-01), Bertin et al.
patent: 5793697 (1998-08-01), Scheuerlein
patent: 5801437 (1998-09-01), Burns
patent: 5831325 (1998-11-01), Zhang
patent: 5835396 (1998-11-01), Zhang
patent: 5838530 (1998-11-01), Zhang
patent: 5883409 (1999-03-01), Guterman et al.
patent: 5915167 (1999-06-01), Leedy
patent: 5937281 (1999-08-01), Wu
patent: 5969380 (1999-10-01), Syyedy
patent: 5976953 (1999-11-01), Zavracky et al.
patent: 5978258 (1999-11-01), Manning
patent: 5985693 (1999-11-01), Leedy
patent: 5991193 (1999-11-01), Gallagher et al.
patent: 5994757 (1999-11-01), Ichikawa et al.
patent: 6034882 (2000-03-01), Johnson et al.
patent: 6051851 (2000-04-01), Ohmi et al.
patent: 6055180 (2000-04-01), Gudesen et al.
patent: 6057598 (2000-05-01), Payne et al.
patent: 6072234 (2000-06-01), Camien et al.
patent: 6087722 (2000-07-01), Lee et al.
patent: 6103555 (2000-08-01), Choi
patent: 6110278 (2000-08-01), Saxena
patent: 6130835 (2000-10-01), Scheuerlein
patent: 6133640 (2000-10-01), Leedy
patent: 6150705 (2000-11-01), Chen
patent: 6185122 (2001-02-01), Johnson et al.
patent: 6197641 (2001-03-01), Hergenrother et al.
patent: 6208545 (2001-03-01), Leedy
patent: 6249010 (2001-06-01), Bergemont et al.
patent: RE37259 (2001-07-01), Ovshinsky
patent: 6281042 (2001-08-01), Ahn et al.
patent: 6291858 (2001-09-01), Ma et al.
patent: 6307257 (2001-10-01), Huang et al.
patent: 6314013 (2001-11-01), Ahn et al.
patent: 6322903 (2001-11-01), Siniaguine et al.
patent: 6323536 (2001-11-01), Cutter et al.
patent: 6337521 (2002-01-01), Masuda
patent: 6351028 (2002-02-01), Akram
patent: 6353265 (2002-03-01), Michii
patent: 6355501 (2002-03-01), Fung et al.
patent: 6420215 (2002-07-01), Johnson et al.
patent: 6504753 (2003-01-01), Scheuerlein et al.
patent: 6509624 (2003-01-01), Radens et al.
patent: 6509638 (2003-01-01), Fujimoto et al.
patent: 6515904 (2003-02-01), Moore
patent: 6545898 (2003-04-01), Scheuerlein
patent: 6549447 (2003-04-01), Fricke et al.
patent: 6551857 (2003-04-01), Leedy
patent: 6567287 (2003-05-01), Scheuerlein
patent: 6574145 (2003-06-01), Kleveland et al.
patent: 6580144 (2003-06-01), Anthony
patent: 6593624 (2003-07-01), Walker
patent: 6618295 (2003-09-01), Scheuerlein
patent: 6640178 (2003-10-01), Scheuerlein et al.
patent: 6664639 (2003-12-01), Cleeves
patent: 6730543 (2004-05-01), Akram
patent: 6737675 (2004-05-01), Patel et al.
patent: 6812575 (2004-11-01), Furusawa
patent: 6841813 (2005-01-01), Walker et al.
patent: 6853049 (2005-02-01), Herner
patent: 6881994 (2005-04-01), Lee et al.
patent: 6888750 (2005-05-01), Walker et al.
patent: 6897514 (2005-05-01), Kouznetsov et al.
patent: 6911723 (2005-06-01), Akram
patent: 7329565 (2008-02-01), Herner
patent: 2001/0054759 (2001-12-01), Nishiura
patent: 2002/0088998 (2002-07-01), Knall et al.
patent: 2002/0140051 (2002-10-01), Knall et al.
patent: 2003/0003632 (2003-01-01), Cleeves
patent: 0 073 486 (1982-08-01), None
patent: 0 387 834 (1990-09-01), None
patent: 0 395 886 (1990-11-01), None
patent: 0 516 866 (1992-12-01), None
patent: 0 606 653 (1994-07-01), None
patent: 0 644 548 (1994-09-01), None
patent: 0 800 137 (1997-03-01), None
patent: 61-222216 (1986-10-01), None
patent: 6-22352 (1995-04-01), None
patent: 63-52463 (1998-03-01), None
patent: WO 94/26083 (1994-11-01), None
patent: WO 01/84553 (2001-11-01), None
H. Jiang et al., “Thermal Oxidation of Transition Metal Silicides,”Thin Soild Films, 1986, pp. 115-129, California Institute of Technology, Pasadena, CA.
I.D. Kaendler
Foley & Lardner LLP
Pham Thanhha
SanDisk 3D LLC
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