Signal measuring apparatus and signal measuring method

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element

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324751, 324752, 324753, G01R 31302

Patent

active

055504795

ABSTRACT:
In a signal measuring apparatus a distance between a sample and a probe is adjusted, a voltage is applied through the sample and the probe and a signal is measured using a current flowing through the sample and the probe. That is, a current flowing through the sample and the probe is chopped by a laser beam at a prescribed frequency and is fetched into a sampling apparatus to generate a sample value of the current. The sample value is compared with a current setting value arbitrarily set in a comparator, and a reference voltage is generated according to a compared result in a control logic circuit and a D/A converter. The reference voltage is fed back to the sampling apparatus to converge the current flowing through the sample and the probe at the current setting value. Therefore, a signal of the sample is measured according to the reference voltage on condition that the current is converged at the current setting value.

REFERENCES:
patent: 4870344 (1989-09-01), Stille
patent: 5185571 (1993-02-01), Brust
patent: 5185572 (1993-02-01), Yagi et al.
patent: 5465043 (1995-11-01), Sakai
Literature (30a-P-4) of Society for Applied Physics in Autumn of 1993, p. 506 month unavailable.

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