Shower plate, plasma processing apparatus, and product...

Details Shower plate, plasma processing apparatus, and product... Shower plate, plasma processing apparatus, and product...

2011-02-01

2011-02-01

Cleveland, Michael (Department: 1712)

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With gas inlet structure

C156S345340, C118S715000

Reexamination Certificate

active

07879182

ABSTRACT:
A system for processing a substrate uniformly by increasing the number of gas discharge holes being arranged per unit area of a shower plate as receding from the center of the shower plate or increasing the radii of the gas discharge holes as receding from the center of the shower plate thereby making the plasma excitation gas flow uniform.

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