Shield to prevent cryopump charcoal array from shedding during c

Details Shield to prevent cryopump charcoal array from shedding during c Shield to prevent cryopump charcoal array from shedding during c

1999-01-19

2000-09-26

Doerrler, William

Refrigeration

Low pressure cold trap process and apparatus

B01D 800

Patent

active

061229210

ABSTRACT:
The present invention provides a regeneration shield 22 for a vacuum system, typically used in the processing of integrated circuits. The regeneration shield protects fragile arrays 13, having a dislocatable material 16, such as charcoal, in a high vacuum pump 4 from volatile regeneration gases, which impinge the fragile material on the array and dislocate that material to cause pumping inefficiencies and scrap. The shield may be planar, concave, or convex and may have sides. The shield may also have inwardly and outwardly extending flanges.

REFERENCES:
patent: 3485054 (1969-12-01), Hogan
patent: 4121430 (1978-10-01), Bachler et al.
patent: 4311018 (1982-01-01), Welch
patent: 4446702 (1984-05-01), Peterson et al.
patent: 4479360 (1984-10-01), Bachler et al.
patent: 4514204 (1985-04-01), Bonney et al.
patent: 4611467 (1986-09-01), Peterson
patent: 4803845 (1989-02-01), Strasser et al.
patent: 4815303 (1989-03-01), Duza
patent: 5111667 (1992-05-01), Hafner et al.
patent: 5156007 (1992-10-01), Bartlett et al.
patent: 5301511 (1994-04-01), Barlett et al.
patent: 5400604 (1995-03-01), Hafner et al.
patent: 5513499 (1996-05-01), deRijke
patent: 5517823 (1996-05-01), Andeen et al.
patent: 5518593 (1996-05-01), Hosokawa et al.
patent: 5658442 (1997-08-01), Van Gogh et al.
patent: 5736021 (1998-04-01), Ding et al.

Affiliated with

Also associated with

Rating

Shield to prevent cryopump charcoal array from shedding during c does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Shield to prevent cryopump charcoal array from shedding during c, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Shield to prevent cryopump charcoal array from shedding during c will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2090961