Shield plate electrode for semiconductor device

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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Details

C257S409000, C257S630000, C438S262000, C438S140000, C438S454000

Reexamination Certificate

active

07808033

ABSTRACT:
A semiconductor device of this invention is a single-layer gate nonvolatile semiconductor memory in which a floating gate having a predetermined shape is formed on a semiconductor substrate. This floating gate opposes a diffusion layer serving as a control gate via a gate oxide film and is capacitively coupled with the diffusion layer by using the gate oxide film as a dielectric film. The diffusion layer immediately below the dielectric film is insulated from the semiconductor substrate by an insulating film such as a silicon oxide film. A pair of diffusion layers are formed in surface regions of the semiconductor substrate on the two sides of the floating gate extending on a tunnel oxide film. This invention can realize a reliable semiconductor device which is a single-layer gate semiconductor device by which a low-cost process is possible, has a control gate which can well withstand a high voltage applied when data is erased or written, and can prevent an operation error by minimizing variations in the threshold value.

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Office Action from U.S. Appl. No. 11/370,709 mailed May 1, 2008.
The Response to Office Action from U.S. Appl. No. 11/370,709 filed Sep. 2, 2008.
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English Translation of Official Action in Japanese Application No. 2006-099577 dated Mar. 2, 2010, and English abstracts of JP references, 16 pages.

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