Shell flow sensor

Details Shell flow sensor Shell flow sensor

2007-08-13

2009-06-23

Thompson, Jewel (Department: 2855)

Metal working

Method of mechanical manufacture

Electrical device making

Reexamination Certificate

active

07549206

ABSTRACT:
A flow sensor system and a method for fabricating the same. A substrate is provided, comprising a detector wafer upon which a flow sensor is formed. One or more shells can then be configured upon the substrate whose walls form a flow channel. The flow channel is fabricated directly upon the substrate in a manner that allows the flow channel to couple heat transfer directly to the flow sensor in order to eliminate the need for two or more different types of sacrificial layers during the fabrication of the flow sensor upon the substrate and in which the shell(s) is coupled with fluidic measurement to provide for the flow sensor.

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patent: 2007/0044554 (2007-03-01), Higashi et al.
patent: 2007/0113642 (2007-05-01), Bonne et al.

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