4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. With measuring, testing, or inspecting

Son T. Lu

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Chip-scale atomic clock with two thermal zones

Oscillators – Molecular or particle resonant type
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Miniature optically transparent window

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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Shell flow sensor

Metal working – Method of mechanical manufacture – Electrical device making
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