Sheet beam-type testing apparatus

Details Sheet beam-type testing apparatus Sheet beam-type testing apparatus

2006-02-24

2008-08-26

Berman, Jack I (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

C250S310000, C250S492200, C361S234000

Reexamination Certificate

active

07417236

ABSTRACT:
An electron beam apparatus such as a sheet beam based testing apparatus has an electron-optical system for irradiating an object under testing with a primary electron beam from an electron beam source, and projecting an image of a secondary electron beam emitted by the irradiation of the primary electron beam, and a detector for detecting the secondary electron beam image projected by the electron-optical system; specifically, the electron beam apparatus comprises beam generating means2004for irradiating an electron beam having a particular width, a primary electron-optical system2001for leading the beam to reach the surface of a substrate2006under testing, a secondary electron-optical system2002for trapping secondary electrons generated from the substrate2006and introducing them into an image processing system2015, a stage2003for transportably holding the substrate2006with a continuous degree of freedom equal to at least one, a testing chamber for the substrate2006, a substrate transport mechanism for transporting the substrate2006into and out of the testing chamber, an image processing analyzer2015for detecting defects on the substrate2006, a vibration isolating mechanism for the testing chamber, a vacuum system for holding the testing chamber at a vacuum, and a control system2017for displaying or storing positions of defects on the substrate2006.

REFERENCES:
patent: 2452893 (1948-11-01), Bachman
patent: 3983401 (1976-09-01), Livesay
patent: 4180738 (1979-12-01), Smith et al.
patent: 4412133 (1983-10-01), Eckes et al.
patent: 4584479 (1986-04-01), Lamattina et al.
patent: 4607167 (1986-08-01), Petric
patent: 4911103 (1990-03-01), Davis et al.
patent: 4912052 (1990-03-01), Miyoshi et al.
patent: 4944645 (1990-07-01), Suzuki
patent: 5047646 (1991-09-01), Hattori et al.
patent: 5359197 (1994-10-01), Komatsu et al.
patent: 5362968 (1994-11-01), Miyoshi et al.
patent: 5444256 (1995-08-01), Nagai et al.
patent: 5576833 (1996-11-01), Miyoshi et al.
patent: 5747819 (1998-05-01), Nakasuji et al.
patent: 5751538 (1998-05-01), Nakasuji
patent: 5763863 (1998-06-01), Grosfeld et al.
patent: 5770863 (1998-06-01), Nakasuji
patent: 5822171 (1998-10-01), Shamouilian et al.
patent: 5892224 (1999-04-01), Nakasuji
patent: 5981947 (1999-11-01), Nakasuji et al.
patent: 5994704 (1999-11-01), Nakasuji
patent: 6025600 (2000-02-01), Archie et al.
patent: 6087667 (2000-07-01), Nakasuji et al.
patent: 6125522 (2000-10-01), Nakasuji
patent: 6265719 (2001-07-01), Yamazaki et al.
patent: 6268606 (2001-07-01), Abe et al.
patent: 6315512 (2001-11-01), Tabrizi et al.
patent: 6344750 (2002-02-01), Lo et al.
patent: 6476390 (2002-11-01), Murakoshi et al.
patent: 6583634 (2003-06-01), Nozoe et al.
patent: 6603130 (2003-08-01), Bisschops et al.
patent: 0999572 (2000-05-01), None
patent: 52-115161 (1977-09-01), None
patent: 52-117567 (1977-10-01), None
patent: 57-072326 (1982-05-01), None
patent: 57-125871 (1982-08-01), None
patent: 60-000741 (1985-01-01), None
patent: 62-100936 (1985-10-01), None
patent: 61-239624 (1986-10-01), None
patent: 62-195838 (1987-08-01), None
patent: 63-6737 (1988-01-01), None
patent: 1-95456 (1989-04-01), None
patent: 03-022339 (1991-01-01), None
patent: 03-053439 (1991-03-01), None
patent: 03-102814 (1991-04-01), None
patent: 03-266350 (1991-11-01), None
patent: 03-276548 (1991-12-01), None
patent: 04-266350 (1992-09-01), None
patent: 05-047649 (1993-02-01), None
patent: 05-063261 (1993-03-01), None
patent: 05-251316 (1993-09-01), None
patent: 07-065766 (1995-03-01), None
patent: 07-249393 (1995-09-01), None
patent: 08-138611 (1996-05-01), None
patent: 9-73872 (1997-03-01), None
patent: 09-073872 (1997-03-01), None
patent: 09-311112 (1997-12-01), None
patent: 10-062503 (1998-03-01), None
patent: 10-073424 (1998-03-01), None
patent: 10-125271 (1998-05-01), None
patent: 10-177952 (1998-06-01), None
patent: 10302697 (1998-11-01), None
patent: 11-132975 (1999-05-01), None
patent: 2000-3692 (2000-01-01), None
patent: 2000-67798 (2000-03-01), None
patent: 2000-067798 (2000-03-01), None
patent: 2000-090868 (2000-03-01), None
patent: 2000-100369 (2000-04-01), None
patent: 2000-133565 (2000-05-01), None
patent: WO 9950651 (1999-10-01), None
patent: WO 00/25352 (2000-05-01), None
Mamoru Nakasuji et al.,Low Voltage and high speed operating electrostatic wafer chunk using sputtered tantalum oxide membrane, J. Vac. Sci. Technol. A 12(5), Sep./Oct. 1994, American Vacuum Society pp. 2834-2839.
Mamoru Nakasuji et al.,High-Emittance and Low-Brightness Electron Gun for Reducing-Image Projection system: Computer Simulation, Jpn. J. Appl. Phys. vol. 36 (1997) pp. 2404-2408.
H. Hayashi, et al., LSI Testing Symposium 1998,Minutes of the meeting, P160 (1998) (partial translation).
B. Lischke et al.,Multi beam Concepts for Nanometer Devices, Japanese Journal of Applied Physics, vol. 28, No. 10, Oct. 1989, pp. 2058-2064.
P. Sandland et al.,A electron-beam inspecting system for x-ray mask production, J. Vac. Sci. Technol. B9 (b), Nov./Dec. 1991, American Vacuum Society, pp. 3005-3009.
W.D. Meisburger, et al.,Requirements and performance of an electron-beam column designed for x-ray mask inspection, J. Vac. Soc. Technol., B9 (6), Nov./Dec. 1991, American Vacuum Society, pp. 3010-3014.
Table 5-1work Finction in Metalsp. 116.

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