Shared sensors for detecting substrate position/presence

Details Shared sensors for detecting substrate position/presence Shared sensors for detecting substrate position/presence

2005-02-15

2005-02-15

Tran, Khoi H. (Department: 3651)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Article handling

C414S936000

Reexamination Certificate

active

06856858

ABSTRACT:
A transfer chamber of a semiconductor processing tool is adapted to couple to plural process and/or load lock chambers. A reduced number of substrate sensors are provided in the transfer chamber to confirm the presence and/or positioning of substrates with respect to the process and/or load lock chambers. In one embodiment, each process and/or load lock chamber may share sensors with adjacent chambers and with chambers that are not adjacent.

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