Shape memory alloy film actuated microvalve

Details Shape memory alloy film actuated microvalve Shape memory alloy film actuated microvalve

1993-04-19

1994-07-05

Chambers, A. Michael

Fluid handling

Processes

251 11, 25112901, 60528, F16K 3100

Patent

active

053258800

ABSTRACT:
A sub-miniature valve which provides an actuator of shape memory alloy film coupled so as to move a poppet adjacent to a valve port. The shape memory alloy film actuator is thermally cycled through its phase change transition temperature, resulting in either a contraction or elongation of the actuator. This causes the poppet to move relative to the port and either increase or decrease fluid flow. The shape memory alloy film is biased toward its deformed position when cooled below its transition temperature. The valve can be electrically operated with commonly available voltages, including those used for micro-electronics. The relatively large forces and displacements achieved using the shape memory alloy film provide less restriction and greater flow than in other similarly sized valves.

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