Shape measuring device and shape measuring method

Details Shape measuring device and shape measuring method Shape measuring device and shape measuring method

2006-07-18

2006-07-18

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

C250S307000, C250S310000, C250S492200, C250S492300

Reexamination Certificate

active

07078688

ABSTRACT:
This invention is to provide a shape measuring device and a shape measuring method that can accurately measure a cross-sectional shape or a three-dimensional shape of a sample without using matching of characteristics. A shape measuring apparatus comprises a charged particle beam apparatus comprising a processor for measuring detected charged particles signal generated from the sample. The charged particle beam is irradiated to sample at first angle to generate a first signal and second angle to generate second signal. The processor selects a parameter indicating a relation between the first signal and a height of the sample or an inclination angle of the specimen until the first signal which achieves the second signal.

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Allgair, John, et al. “Implementation of Spectroscopic Critical Dimension (SCD™) for Gate CD Control and Stepper Characterization” Proceedings of SPIE, vol. 4344, 2001, pp. 462-471.

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