Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent
1998-06-12
1999-11-16
Kim, Robert H.
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
356360, G01B 902
Patent
active
059867604
ABSTRACT:
A method of measuring a surface shape of a target surface, and a lens manufacturing process for manufacturing a lens having a surface shape figured to high-precision. The method and process includes the steps of first, interferometrically measuring the surface shape of the target surface or the lens surface. Then second, measuring a surface shape of a prototype target surface. Then third, determining a rotationally symmetric error component of the difference between the target surface shape or the lens surface shape and the prototype target surface shape. Then fourth, expressing the rotationally symmetric error as a sum of two components, one being slowly varying and the other being a remainder. The slowly varying component is at least determined by performing the third step, while the remainder component is determined by performing the first step.
REFERENCES:
patent: 5416586 (1995-05-01), Tronolone et al.
Ebi Masami
Genma Takashi
Ichikawa Hajime
Nakayama Shigeru
Onuki Tetsuji
Kim Robert H.
Nikon Corporation
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