Shaft cooling mechanisms

Details Shaft cooling mechanisms Shaft cooling mechanisms

2005-03-08

2005-03-08

Mills, Gregory (Department: 1763)

Coating apparatus

Gas or vapor deposition

Work support

C118S715000, C118S733000, C118S500000, C250S492100, C156S345550, C165S177000

Reexamination Certificate

active

06863736

ABSTRACT:
The present invention provides a rotating shaft that can extend between two regions having different ambient pressures. The rotating shaft can include a rotatable hollow outer shell that is coupled to a proximal portion of an inner shaft with a limited number of contact points. A plurality of thermal breaks disposed between the inner shaft and the hollow outer shell impede heat transfer between these two components. A rotary seal coupled to the distal portion of the inner shaft preserves the pressure differential between the two regions. Further, a heat sink removes heat transferred to the seal to ensure that the temperature of the seal remains within a range suitable for its operation. The rotating shaft of the invention can be utilized, for example, in an ion implantation system by the coupling of the outer shell to a wafer holder to position and orient a wafer in a path of an ion beam.

REFERENCES:
patent: 4256453 (1981-03-01), Csapo
patent: 4577871 (1986-03-01), Weghaupt et al.
patent: 4592557 (1986-06-01), Iversen
patent: 5641969 (1997-06-01), Cooke et al.
patent: 5826885 (1998-10-01), Helgeland
patent: 6200634 (2001-03-01), Johnsgard et al.
patent: 6305180 (2001-10-01), Miller et al.
patent: 61160671 (1986-07-01), None
patent: 05326388 (1993-12-01), None

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