Chemistry of inorganic compounds – Silicon or compound thereof – Elemental silicon
Patent
1991-04-26
1992-06-02
Kunemund, Robert
Chemistry of inorganic compounds
Silicon or compound thereof
Elemental silicon
423342, 423347, 423DIG20, 55 97, C01B 3318
Patent
active
051184869
ABSTRACT:
The present invention is a process for separating particulate silicon from a liquid by-product stream containing silanes. The liquid by-product stream comprising silanes and particulate silicon is atomized into a heated zone to effect vaporization of the liquid silanes, thus drying the particulate silicon. The dried particulate silicon is separated from the gaseous silanes by filtration or other suitable means. The separated solid and gaseous phases may be used as feed to the process generating the by-product stream or as a feed for other processes.
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Burgie Richard A.
Heng Owen A.
Boley William F.
Hemlock Semiconductor Corporation
Horton Ken
Kunemund Robert
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