4. Chemistry of inorganic compounds
  5. Silicon or compound thereof
  6. Elemental silicon

Owen A. Heng

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Separation by atomization of by-product stream into particulate

Chemistry of inorganic compounds – Silicon or compound thereof – Elemental silicon
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Treatment of vent gas to remove hydrogen chloride

Organic compounds -- part of the class 532-570 series – Organic compounds – Silicon containing
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Profile ID: LFUS-PAI-P-1908635

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