Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate
2008-10-21
2010-11-16
Chowdhury, Tarifur (Department: 2886)
Optics: measuring and testing
Inspection of flaws or impurities
Surface condition
Reexamination Certificate
active
07834994
ABSTRACT:
An apparatus and method incorporating at least two sensors that detect the presence of a substrate is provided. In one embodiment, a method for transferring a substrate in a processing system is described. The method includes positioning a substrate on an end effector in a first chamber, moving the substrate through an opening between the first chamber and a second chamber along a substrate travel path, and sensing opposing sides of the substrate travel path using at least two sensors positioned proximate to the opening, each of the at least two sensors defining a beam path that is directed through opposing edge regions of the substrate when at least a portion of an edge region traverses the beam path.
REFERENCES:
patent: 4153367 (1979-05-01), Lietar et al.
patent: 4819167 (1989-04-01), Cheng et al.
patent: 5452521 (1995-09-01), Niewmierzycki
patent: 5483138 (1996-01-01), Shmookler et al.
patent: 5563798 (1996-10-01), Berken et al.
patent: 5917601 (1999-06-01), Shimazaki et al.
patent: 5980194 (1999-11-01), Freerks et al.
patent: 6120601 (2000-09-01), Landau et al.
patent: 6190037 (2001-02-01), Das et al.
patent: 6215897 (2001-04-01), Beer et al.
patent: 6235634 (2001-05-01), White et al.
patent: 6294296 (2001-09-01), Weigl et al.
patent: 6327517 (2001-12-01), Sundar
patent: 6339730 (2002-01-01), Matsushima et al.
patent: 6356346 (2002-03-01), Hagen et al.
patent: 6502054 (2002-12-01), Mooring et al.
patent: 6556807 (2003-04-01), Horie et al.
patent: 6556887 (2003-04-01), Freeman et al.
patent: 6577923 (2003-06-01), White et al.
patent: 6629053 (2003-09-01), Mooring
patent: 6684123 (2004-01-01), Jevtic et al.
patent: 6856858 (2005-02-01), Kurita
patent: 7039501 (2006-05-01), Freeman et al.
patent: 2001/0024609 (2001-09-01), White et al.
patent: 2002/0021959 (2002-02-01), Schauer et al.
patent: 2002/0111710 (2002-08-01), Perlov et al.
patent: 2003/0012631 (2003-01-01), Pencis et al.
patent: 2003/0014155 (2003-01-01), Pencis et al.
patent: 2003/0083776 (2003-05-01), Schauer et al.
patent: 2003/0117680 (2003-06-01), Allen et al.
patent: 2003/0132746 (2003-07-01), Cox
patent: 2003/0149947 (2003-08-01), Sarig
patent: 2003/0154002 (2003-08-01), Lappen et al.
patent: 2003/0161706 (2003-08-01), Kurita et al.
patent: 2003/0179369 (2003-09-01), Feldman et al.
patent: 2003/0218741 (2003-11-01), Guetta
patent: 2003/0227618 (2003-12-01), Some
patent: 2004/0016896 (2004-01-01), Almogy et al.
patent: 2004/0055397 (2004-03-01), Kurita
patent: 2004/0067127 (2004-04-01), Hofmeister et al.
patent: 2004/0075068 (2004-04-01), Feldman et al.
patent: 2005/0046831 (2005-03-01), Chen
patent: 0891840 (1999-01-01), None
patent: 1102137 (2001-05-01), None
PCT International Search Report and Written Opinion for PCT/US06/01724, Dated Nov. 20, 2006 (APPM/009058.PCT).
Korean Office Action for Application No. 10-2008-7019851 dated May 31, 2010 (APPM/9058/KORS).
Bagley William A.
Hoffman James
Inagawa Makoto
Kim Kyung-Tae
Kim Sam
Applied Materials Inc.
Chowdhury Tarifur
Hansen Jonathan M
Patterson & Sheridan LLP
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