Sensor with polycrystalline silicon resistors

Details Sensor with polycrystalline silicon resistors Sensor with polycrystalline silicon resistors

1984-05-25

1986-11-18

Woodiel, Donald O.

Measuring and testing

Fluid pressure gauge

Diaphragm

29593, 29610SG, 73721, 73DIG4, 338 4, 338 9, 338195, G01L 906

Patent

active

046228560

ABSTRACT:
Sensor with polycrystalline silicon resistors which are applied to a substrate and are covered with a dielectric passivating layer, characterized by the feature that the resistors are thermally adapted by targeted adjustment of their dopings and by suitable healing, and are balanced by laser trimming.

REFERENCES:
patent: 3938175 (1976-02-01), Jaffe
patent: 4503709 (1985-03-01), Ruhle

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