Sensor package and method

Details Sensor package and method Sensor package and method

2006-04-04

2006-04-04

Oen, William (Department: 2855)

Measuring and testing

Fluid pressure gauge

With pressure and/or temperature compensation

Reexamination Certificate

active

07021147

ABSTRACT:
A sensor package and method are described. The sensor package includes an enclosure, a diaphragm coupled to the enclosure. The diaphragm is configured to receive vibrations from an ambient environment. Further, the sensor package includes a pressure sensing element disposed inside the enclosure, and a pressure transfer medium disposed inside the enclosure and proximate the pressure sensing element, where the pressure transfer medium includes a fluid, and a plurality of filler particles suspended in the fluid. The filler particles serve to reduce a coefficient of thermal expansion of the pressure transfer medium.

REFERENCES:
patent: 4686764 (1987-08-01), Adams et al.
patent: 4732042 (1988-03-01), Adams
patent: 5625151 (1997-04-01), Yamaguchi
patent: 5682594 (1997-10-01), Kennedy et al.
patent: 6509423 (2003-01-01), Zhu
patent: 6798072 (2004-09-01), Kajiwara et al.
patent: 2004/0214377 (2004-10-01), Starkovich et al.

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