Sensor having a cantilever

Details Sensor having a cantilever Sensor having a cantilever

1990-03-12

1992-01-14

Ruehl, Charles A.

Measuring and testing

Dynamometers

Responsive to force

73150R, 73 2403, 7386261, G01L 500

Patent

active

050799584

ABSTRACT:
A sensor comprises a tiny cantilever of a thin film having a detection region at its free end portion, a detector for detecting a displacement of the cantilever caused by material acting on the detecting region, and calculation unit for calculating an amount of the material acting on the detection region, based on the displacement of the cantilever which has been detected by the detector, thereby to measure the intensity of a particle-stream applied to the detection region or the thickness of a film formed on the detection region.

REFERENCES:
patent: 3561253 (1971-02-01), Dorman
patent: 3653253 (1972-04-01), Olin
patent: 3723778 (1973-03-01), Lu
patent: 4157661 (1979-06-01), Schindel
patent: 4638669 (1987-01-01), Chou
patent: 4724318 (1988-02-01), Binnig
patent: 4851671 (1989-07-01), Pohl
"Calculation of the Bloch wall contrast in magnetic force microscopy", U. Hartman et al., Journal of Microscopy, vol. 152, Pt. 1, Oct. 1988, pp. 281-288.
"Tunneling Accelerometer" by A. A. Baski et al., Department of Applied Physics, Stanford University, Jul. 1988.

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