Sensor for determining photoresist developer strength

Details Sensor for determining photoresist developer strength Sensor for determining photoresist developer strength

1987-12-17

1989-08-15

Nelms, Davis C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

250373, 356442, 354298, G01N 1506, G01J 142

Patent

active

048577502

ABSTRACT:
An optical analyzer and a developer recirculation system is used to determine the amount of photoresist polymer dissolved in a quantity of developer solution and the sensor output signal is utilized by a control computer to control the admission of fresh developer solution to replace used developer and maintain a fixed level of dissolved photoresist polymer to keep the developer bath at a fixed level of chemical activity.

REFERENCES:
patent: 3712203 (1973-01-01), Kishi et al.
patent: 3722559 (1973-03-01), Hoffman
patent: 3990088 (1976-11-01), Takita
patent: 4021832 (1977-05-01), Krehbiel et al.
patent: 4166702 (1979-09-01), Okamoto et al.
patent: 4469424 (1984-09-01), Matsui et al.
patent: 4669847 (1987-06-01), Taniguchi et al.
patent: 4671309 (1987-06-01), Iemura et al.
patent: 4796590 (1989-01-01), Degobert et al.

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