Sensor and method for manufacturing a sensor

Details Sensor and method for manufacturing a sensor Sensor and method for manufacturing a sensor

1996-09-24

1998-05-26

Williams, Hezron E.

Measuring and testing

Specimen stress or strain, or testing by stress or strain...

Specified electrical sensor or system

7351401, 7351435, 7351432, 361280, G01L 100

Patent

active

057569010

ABSTRACT:
In a sensor and a method for manufacturing a sensor, a movable element is patterned out of a silicon layer and is secured to a substrate. The conducting layer is subdivided into various regions, which are electrically insulated from one another. The electrical connection between the various regions of the silicon layer is established by a conducting layer, which is arranged between a first and a second insulating layer.

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patent: 5545912 (1996-08-01), Ristic et al.
patent: 5550090 (1996-08-01), Ristic et al.

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