Measuring and testing – Instrument proving or calibrating – Volume of flow – speed of flow – volume rate of flow – or mass...
Patent
1987-07-28
1990-05-29
Noland, Tom
Measuring and testing
Instrument proving or calibrating
Volume of flow, speed of flow, volume rate of flow, or mass...
73 23, 73335, 73 29, 338 34, 338 35, G01N 2704
Patent
active
049285130
ABSTRACT:
A sensor having a pair of sensor units, one of which is a detecting sensor unit and the other of which is a reference sensor unit, wherein each of the units comprises a substrate with a hollow portion, a thin insulating layer with a bridge, cantilever or diaphragm shape disposed on the substrate, a sensitive film disposed on the bridge, cantilever or diaphragm portion of the thin insulating layer, and a pair of electrodes being in contact with the sensitive film, the sensitive film section of the detecting sensor unit being exposed to an atmosphere to be measured so that the electrical resistance of the sensitive film changes with a variation in the physical quantity of the atmosphere to be detected, and the sensitive film section of the reference sensor unit being sealed within a shielding container so that the electrical resistance of the sensitive film is not influenced by a variation in the physical quantity of the atmosphere outside of the container, whereby the absolute physical quantity of the atmosphere to be detected is determined by the output power of the sensor based on a difference between the electrical resistance of the detecting sensor unit and the electrical resistance of the reference sensor unit.
REFERENCES:
patent: 4177667 (1979-12-01), Rolf et al.
patent: 4337658 (1982-07-01), Motchenbacher et al.
patent: 4343768 (1982-08-01), Kimura
patent: 4381922 (1983-03-01), Frey et al.
patent: 4497701 (1985-02-01), Murata et al.
patent: 4561286 (1985-12-01), Seikler et al.
patent: 4580439 (1986-04-01), Manaka
patent: 4635467 (1987-01-01), Hoffa et al.
Hijikigawa Masaya
Inami Yasuhiko
Kataoka Shoei
Sugihara Takashi
Tabuchi Hiroki
Noland Tom
Sharp Kabushiki Kaisha
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