Semiconductor with implanted dielectric layer having patched pin

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

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Details

257348, 257349, 257350, 257351, 257352, 257353, 257354, 257401, 257507, 257638, 257639, 257649, H01L 2701

Patent

active

056082525

ABSTRACT:
Pin-holes or thin sections in the implanted dielectric layer of a SIMOX device are patched by forming a reverse biasable PN junction within the depth range of or proximate to the dielectric layer. A charge depletion zone forms about the PN junction when the Latter is reverse-biased and reinforces or patches weak spots in the implanted dielectric layer such as pin-holes and thin-sections.

REFERENCES:
patent: 4686758 (1987-08-01), Liu et al.
patent: 4837172 (1989-06-01), Mizuno et al.
patent: 4975126 (1990-12-01), Margail et al.
patent: 5047356 (1991-09-01), Li et al.
patent: 5080730 (1992-01-01), Wittkower
patent: 5143858 (1992-09-01), Tomozane et al.
patent: 5196355 (1993-03-01), Wittkower

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