Semiconductor wafer treatment method, semiconductor wafer...

Details Semiconductor wafer treatment method, semiconductor wafer... Semiconductor wafer treatment method, semiconductor wafer...

2008-01-01

2008-01-01

Smith, Bradley K (Department: 2891)

Semiconductor device manufacturing: process

Including control responsive to sensed condition

Optical characteristic sensed

C438S005000, C438S007000, C257SE21530

Reexamination Certificate

active

07314766

ABSTRACT:
A treatment method of a semiconductor wafer includes treating the semiconductor wafer in a first solution having at least one kind of an oxidative acid and an oxidizing agent and treating the semiconductor wafer in a second solution having at least one of HF and NH4F.

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