Semiconductor wafer transfer apparatus

Details Semiconductor wafer transfer apparatus Semiconductor wafer transfer apparatus

2006-02-14

2006-02-14

Underwood, Donald W. (Department: 3652)

Material or article handling

Load carried along a horizontal linear path

C198S495000

Reexamination Certificate

active

06997670

ABSTRACT:
A semiconductor wafer transfer apparatus includes a wafer supporting block to support a semiconductor wafer, a casing which is formed along a moving path of the wafer supporting block and having a guiding slot through which a part of the wafer supporting block passes, a driving part which is accommodated in the casing and moves the wafer supporting block, a connection part which connects the driving part with the wafer supporting block, and a shield part which shields the driving part from the guide slot. Accordingly, dust and particles generated inside the casing is effectively prevented from leaking out through the guide slot.

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