Semiconductor wafer pre-aligning apparatus

Details Semiconductor wafer pre-aligning apparatus Semiconductor wafer pre-aligning apparatus

1996-07-16

1997-09-23

Merritt, Karen B.

Material or article handling

Article reorienting device

Orienter has article gripping means

414936, 414941, 198394, B65G 4907

Patent

active

056697520

ABSTRACT:
A semiconductor wafer pre-aligning apparatus includes a wafer transfer unit for transferring a semiconductor wafer, and a wafer stopping unit for stopping and disposing the transferred semiconductor wafer on a predetermined position of a transferring path. The wafer stopping unit includes a stop elevatably disposed on the wafer transferring path and having a plurality of stepped and arc-shaped walls whose radii are different from one another but whose curvature centers coincide, and a device for elevating the wafer stopping unit. Thus, changes in wafer size can be dealt with easily and a clean work environment for wafer treatment can be maintained.

REFERENCES:
patent: 4770600 (1988-09-01), Ishikawa
patent: 5054991 (1991-10-01), Kato
patent: 5183378 (1993-02-01), Asano et al.
patent: 5224586 (1993-07-01), Naka et al.
patent: 5570994 (1996-11-01), Somekh et al.

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