Semiconductor wafer level package

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation

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Details

257419, 257693, H01L 2302

Patent

active

053230515

ABSTRACT:
A semiconductor wafer level package used to encapsulate a device fabricated on a semiconductor substrate wafer before dicing of the wafer into individual chips. A cap wafer is bonded to the semiconductor substrate wafer using a pre-patterned frit glass as a bonding agent such that the device is hermetically sealed inside a cavity. A hole in the cap wafer allows electrical connections to be made to the device through electrodes which pass through the frit glass seal.

REFERENCES:
patent: 3768157 (1973-10-01), Buie
patent: 4477828 (1984-10-01), Scherer
patent: 4791075 (1988-12-01), Lin
patent: 4802952 (1989-02-01), Kobori et al.
patent: 4907065 (1990-03-01), Sahakian
patent: 5121180 (1992-06-01), Beringhause

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