Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2007-06-07
2010-06-01
Berman, Jack I (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
C250S306000, C250S307000, C250S311000
Reexamination Certificate
active
07728294
ABSTRACT:
A semiconductor wafer inspection tool and a semiconductor wafer inspection method capable of conducting an inspection under appropriate conditions in any one of an NVC (Negative Voltage Contrast) mode and a PVC (Positive Voltage Contrast) mode is provided. Primary electrons2are irradiated onto a wafer to be inspected6and the irradiation position thereof is scanned in an XY direction. Secondary electrons (or reflected electrons)10from the wafer to be inspected6are controlled by a charge control electrode5and detected by a sensor11. An image processor converts a detection signal from the sensor11to a detected image, compares the detected image with a predetermined reference image, judges defects, an overall control section14selects inspection conditions from recipe information for each wafer to be inspected6and sets a voltage to be applied to the charge control electrode5. A Z stage8sets the distance between the wafer to be inspected6and the charge control electrode5according to this voltage.
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Hiroi Takashi
Makino Hiroshi
Sasaki Yuko
Tanimoto Kenji
Berman Jack I
Crowell & Moring LLP
Hitachi High-Technologies Corporation
Ippolito Rausch Nicole
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