Semiconductor wafer inspection tool and semiconductor wafer...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C250S306000, C250S307000, C250S311000

Reexamination Certificate

active

07728294

ABSTRACT:
A semiconductor wafer inspection tool and a semiconductor wafer inspection method capable of conducting an inspection under appropriate conditions in any one of an NVC (Negative Voltage Contrast) mode and a PVC (Positive Voltage Contrast) mode is provided. Primary electrons2are irradiated onto a wafer to be inspected6and the irradiation position thereof is scanned in an XY direction. Secondary electrons (or reflected electrons)10from the wafer to be inspected6are controlled by a charge control electrode5and detected by a sensor11. An image processor converts a detection signal from the sensor11to a detected image, compares the detected image with a predetermined reference image, judges defects, an overall control section14selects inspection conditions from recipe information for each wafer to be inspected6and sets a voltage to be applied to the charge control electrode5. A Z stage8sets the distance between the wafer to be inspected6and the charge control electrode5according to this voltage.

REFERENCES:
patent: 6172365 (2001-01-01), Hiroi et al.
patent: 6504393 (2003-01-01), Lo et al.
patent: 6700122 (2004-03-01), Matsui et al.
patent: 2002/0028399 (2002-03-01), Nakasuji et al.
patent: 2003/0201391 (2003-10-01), Shinada et al.
patent: 2003/0206027 (2003-11-01), Nozoe et al.
patent: 2005/0218325 (2005-10-01), Nishiyama et al.
patent: 2006/0016990 (2006-01-01), Suzuki et al.
patent: 2006/0186337 (2006-08-01), Hatano et al.
patent: 2007/0023658 (2007-02-01), Nozoe et al.
patent: 9-320505 (1997-12-01), None
patent: 11-121561 (1999-04-01), None
patent: 11-160247 (1999-06-01), None

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Semiconductor wafer inspection tool and semiconductor wafer... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Semiconductor wafer inspection tool and semiconductor wafer..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor wafer inspection tool and semiconductor wafer... will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-4246824

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.