Optics: measuring and testing – Inspection of flaws or impurities – Having predetermined light transmission regions
Patent
1992-09-30
1995-02-21
Pham, Hoa Q.
Optics: measuring and testing
Inspection of flaws or impurities
Having predetermined light transmission regions
250572, G01N 2188
Patent
active
053921135
ABSTRACT:
Method and apparatus for detecting the presence of selected types of defects, such as chemical stains from a liquid photoresist material or a liquid dielectric material, on a non-visible chosen surface of a semiconductor water that has undergone at least one processing step. In one embodiment, a support substrate for, the wafer is provided that has a highly reflecting surface adjacent to the chosen surface. The reflecting surface and the chosen surface are moved apart, and the chosen surface is illuminated with light to form an optical image of the chosen surface. The optical image of the chosen surface is reflected in the reflecting surface, and the reflected optical image is examined for the presence of selected types of defects. In another embodiment, a portion of this reflecting surface is initially contiguous to the chosen surface. A selected defect, if any, on the chosen surface changes a surface characteristic of the reflecting surface so that the presence of this defect on the chosen surface is visually perceptible on the reflecting surface.
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Galloway Judy U.
Hall Stacy W.
Leroux Pierre
Sayka Anthony
Schmidt Bryan D.
Pham Hoa Q.
VLSI Technology Inc.
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