Semiconductor wafer cassette transfer system

Details Semiconductor wafer cassette transfer system Semiconductor wafer cassette transfer system

1995-01-30

1996-09-17

Werner, Frank E.

Material or article handling

Device for emptying portable receptacle

Nongravity type

414937, 4147446, 118500, B65G 107

Patent

active

055562485

ABSTRACT:
A semiconductor cassette and transfer system for facilitating the direct loading and unloading of wafers from different sides of a cassette by a first robot handling device moveable along a first extension axis and second robot handling device moveable along a second extension axis intersecting said first extension axis at an acute angle, and at a predetermined point concurrent with the center of the cassette as it is disposed in a fixed position within a loadlock chamber of a wafer processing apparatus.

REFERENCES:
patent: 3730595 (1973-05-01), Yakubowski
patent: 4828224 (1989-05-01), Crabb et al.
patent: 4923054 (1990-05-01), Ohtani et al.
patent: 5058526 (1991-10-01), Matsushita et al.
patent: 5340261 (1994-08-01), Oosawa et al.

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