Semiconductor wafer cassette handling cart

Details Semiconductor wafer cassette handling cart Semiconductor wafer cassette handling cart

1989-05-31

1992-03-24

Valenza, Joseph E.

Material or article handling

Article manipulator moves analogous with human hand, finger,...

Having flexible motion transmission means

414590, 4147443, B25J 100

Patent

active

050982443

ABSTRACT:
A cassette handling tool according to the present invention utilizes a mobile cart for handling and transporting wafer cassettes. At one end of the cart is a holder which is adapted for holding and carrying wafer cassettes. At an opposite end of the cart is a handle by which an operator can manipulate the position and orientation of the cassette holder.

REFERENCES:
patent: 3063575 (1962-11-01), Fontana
patent: 4181465 (1980-01-01), Ridderstrom
patent: 4289441 (1981-09-01), Inaba et al.
patent: 4322198 (1982-03-01), Zuber
patent: 4383788 (1983-05-01), Sylvander
patent: 4884938 (1989-12-01), Fujita et al.

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