Semiconductor wafer boat with reduced wafer contact area

Details Semiconductor wafer boat with reduced wafer contact area Semiconductor wafer boat with reduced wafer contact area

1999-06-22

2000-08-08

Ferensic, Denise L.

Heating

Accessory means for holding, shielding or supporting work...

Support structure for heat treating ceramics

432258, 211 4118, F27D 500

Patent

active

060993022

ABSTRACT:
A boat for semiconductor wafers has reduced contact surface area with the wafer, thereby preventing distortion of the wafer during heating. The boat has an upper member; a lower member, a plurality of wafers being loaded between the upper member and the lower member; and a plurality of support members vertically extended between and connecting the upper member to the lower member for supporting the wafers. A plurality of slots are successively and horizontally formed in each of the support members, and the peripheral edge of the wafer is inserted therein, wherein a hemisphere-shaped protrusion is formed inside the slot, and the bottom surface of the wafer contacts and is supported by each hemisphere-shaped protrusion at a single contact point.

REFERENCES:
patent: 4407654 (1983-10-01), Irwin
patent: 5310339 (1994-05-01), Ushikawa
patent: 5718574 (1998-02-01), Shimazu
patent: 5820367 (1998-10-01), Osawa
patent: 5931666 (1999-08-01), Hengst

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