Semiconductor wafer analysis system

Details Semiconductor wafer analysis system Semiconductor wafer analysis system

2011-08-30

2011-08-30

Desire, Gregory M (Department: 2624)

Image analysis

Applications

Manufacturing or product inspection

C324S750010, C324S757030, C324S762050, C382S144000

Reexamination Certificate

active

08009895

ABSTRACT:
A semiconductor wafer analysis system is provided. In an embodiment, the semiconductor wafer analysis system includes a tester to test semiconductor wafers manufactured by at least one manufacturing facility, a wafer map generation module to generate wafer maps on the basis of the test results from the tester, and a wafer analysis module. The wafer analysis module may include a data generation module that divides each wafer map into a plurality of defect analysis regions and generates feature vectors representing the semiconductor wafers, and an operation module that statistically analyzes the feature vectors.

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