Active solid-state devices (e.g. – transistors – solid-state diode – Test or calibration structure
Patent
1996-08-02
2000-07-18
Guay, John
Active solid-state devices (e.g., transistors, solid-state diode
Test or calibration structure
324765, G01R 1512
Patent
active
060910798
ABSTRACT:
A semiconductor wafer testing fixture facilitates burn-in testing of multiple wafers, whereby individual wafers have an array of individual die or integrated circuit chips with their own test circuitry. The wafer has Vcc and Vss buses provided thereon which are coupled to the individual integrated circuit chips and test circuitry. The fixture has a housing sized to accommodate multiple semiconductor wafers in a selected orientation. The wafers are supported within the housing on corresponding shelves, which provides a back bias voltage to the wafer. The fixture has first and second conductive arms for supplying selected voltages to the Vcc and Vss buses for imparting test cycling of the integrated circuits. The first arm has multiple hands which engage the Vcc buses on the wafers supported on corresponding shelves. Likewise, the second arm has multiple second hands which engage the Vss buses on the wafers supported on corresponding shelves.
REFERENCES:
patent: 3839781 (1974-10-01), Russell
patent: 3849872 (1974-11-01), Hubacher
patent: 4103232 (1978-07-01), Sugita et al.
patent: 4288911 (1981-09-01), Ports
patent: 4938654 (1990-07-01), Schram
patent: 5003156 (1991-03-01), Kilpatrick et al.
patent: 5047711 (1991-09-01), Smith et al.
patent: 5059899 (1991-10-01), Farnworth et al.
patent: 5138427 (1992-08-01), Furuyama
patent: 5279975 (1994-01-01), Devereaux et al.
patent: 5317257 (1994-05-01), Sakai
patent: 5355081 (1994-10-01), Nakata et al.
patent: 5532614 (1996-07-01), Chiu
Green Robert Sherman
Weber Larren Gene
Guay John
Micro)n Technology, Inc.
LandOfFree
Semiconductor wafer does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Semiconductor wafer, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor wafer will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2039076