Semiconductor variable capacitor

Details Semiconductor variable capacitor Semiconductor variable capacitor

1998-01-13

1999-11-09

Kincaid, Kristine

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

361287, 361277, 361280, 3612831, 3612834, H01G 501, H01G 5011, H01G 5013

Patent

active

059826088

ABSTRACT:
A variable capacitor in a semiconductor device is described in which the capacitance is varied by the movement of a dielectric material in the space between the plates of the capacitor in response to an external stimulus. A method of making such a variable capacitor is also described in which the capacitor is built in a layered structure with the top layer including a portion of dielectric material extending into the space between the capacitor plates. After formation of the top layer, an intermediate layer is etched away to render the top layer flexible to facilitate movement of the dielectric material in the space between the capacitor plates.

REFERENCES:
patent: 4495820 (1985-01-01), Shimada et al.
patent: 4672849 (1987-06-01), Hoshino
patent: 5325442 (1994-06-01), Knapp

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