Semiconductor trench structure having a sealing plug and method

Details Semiconductor trench structure having a sealing plug and method Semiconductor trench structure having a sealing plug and method

2011-03-08

2011-03-08

Stark, Jarrett J (Department: 2823)

Semiconductor device manufacturing: process

Chemical etching

Combined with coating step

C257S301000

Reexamination Certificate

active

07902075

ABSTRACT:
In one embodiment, a semiconductor device is formed having a trench structure. The trench structure includes a single crystalline semiconductor plug formed along exposed upper surfaces of the trench. In one embodiment, the single crystalline semiconductor plug seals the trench to form a sealed core.

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