Semiconductor transducer or actuator utilizing corrugated suppor

Details Semiconductor transducer or actuator utilizing corrugated suppor Semiconductor transducer or actuator utilizing corrugated suppor

1991-08-30

1992-05-26

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

296211, 156651, 156657, 1566591, 1566611, 156662, H01L 21306, B44C 122, C03C 1500, C03C 2506

Patent

active

051164574

ABSTRACT:
A semiconductor transducer or acutator is disclosed. The transducer and actuator each include a deflecting member with corrugations producing increased vertical travel which is a linear function of applied force. An accurate and easily controlled method that is insensitive to front-to-back alignment is also disclosed for forming uniform corrugations of precise thickness; independent of the thickness of the deflecting member. The cross-sectional shape of the corrugations is not limited by the etching technique, so that any configuation thereof is enabled.

REFERENCES:
patent: 4685996 (1989-08-01), Busta
patent: 4981552 (1991-01-01), Mikkor
patent: 5024953 (1991-06-01), Uematsu et al.
patent: 5045152 (1991-09-01), Sickafus

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