Semiconductor transducer

Details Semiconductor transducer Semiconductor transducer

1977-04-15

1979-04-24

Kucia, Richard R.

Electrical resistors

Strain gauge type

29610SG, 73DIG4, 73777, 338 5, 338 5, 338 13, 73781, G01B 1116

Patent

active

041515021

ABSTRACT:
A semiconductor transducer comprises a semiconductor strain gauge composed of a mono-crystalline semiconducting material and a strain sensing region formed in a first main surface of the mono-crystalline semiconducting material, and a strain measuring member coupled to the semiconductor strain gauge through an alloy material. An electrical insulating layer is attached to a second main surface of the mono-crystalline semiconducting material which is coupled to the strain measuring member through the alloy material. The insulating layer is extended to a side surface of the mono-crystalline semiconducting material thereby to cover the same side.

REFERENCES:
patent: 3451030 (1969-06-01), Garfinkel
patent: 3458345 (1969-07-01), Fenner
patent: 3753196 (1973-08-01), Kurtz et al.
patent: 3913391 (1975-10-01), Kurtz
patent: 3922705 (1975-11-01), Yerman
patent: 4019388 (1977-04-01), Hall
patent: 4047144 (1977-09-01), Wong

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