Semiconductor testing method and semiconductor tester

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices

Reexamination Certificate

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C250S492100, C250S492230, C382S145000, C382S149000, C324S754120

Reexamination Certificate

active

08067752

ABSTRACT:
A semiconductor testing method capable of quickly counting semiconductor cells in which a seemingly horizontal or vertical line is drawn with a mouse, and raster rotation is performed in alignment with the closer axis. After that, the stage is horizontally moved, pattern matching is performed on an image on a position where the image should be disposed, and an angle is adjusted. The stage is moved evenly along the X-axis and the Y-axis, achieving a movement to a destination like a straight line. In synchronization with the smooth movement of the stage, a cell is surrounded in a rectangular frame by a ruler, and the number of cells is displayed with a numeric value.

REFERENCES:
patent: 6723973 (2004-04-01), Saito
patent: 6734687 (2004-05-01), Ishitani
patent: 6772089 (2004-08-01), Ikeda et al.
patent: 6970004 (2005-11-01), Ishitani et al.
patent: 7321680 (2008-01-01), Ikeda et al.
patent: 7397178 (2008-07-01), Ito et al.
patent: 7524689 (2009-04-01), Kato et al.
patent: 2004/0178811 (2004-09-01), Ishitani et al.
patent: 2007/0047800 (2007-03-01), Hiroi et al.
patent: 2000-251824 (2000-09-01), None

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