Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate
2010-04-22
2011-11-29
Vanore, David A (Department: 2881)
Radiant energy
Irradiation of objects or material
Irradiation of semiconductor devices
C250S492100, C250S492230, C382S145000, C382S149000, C324S754120
Reexamination Certificate
active
08067752
ABSTRACT:
A semiconductor testing method capable of quickly counting semiconductor cells in which a seemingly horizontal or vertical line is drawn with a mouse, and raster rotation is performed in alignment with the closer axis. After that, the stage is horizontally moved, pattern matching is performed on an image on a position where the image should be disposed, and an angle is adjusted. The stage is moved evenly along the X-axis and the Y-axis, achieving a movement to a destination like a straight line. In synchronization with the smooth movement of the stage, a cell is surrounded in a rectangular frame by a ruler, and the number of cells is displayed with a numeric value.
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Ando Tohru
Kato Shin-ichi
Nara Yasuhiko
Saito Tsutomu
Sunaoshi Takeshi
Crowell & Moring LLP
Hitachi High-Technologies Corporation
Vanore David A
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