Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Diffusing a dopant
Reexamination Certificate
2007-04-03
2007-04-03
Smith, Zandra V. (Department: 2822)
Semiconductor device manufacturing: process
Introduction of conductivity modifying dopant into...
Diffusing a dopant
C438S965000, C438S496000, C438S412000, C438S413000
Reexamination Certificate
active
10501287
ABSTRACT:
A semiconductor system having a pn transition and a method for manufacturing a semiconductor system are disclosed. The semiconductor system is designed in the form of a chip having an edge region, the semiconductor system includes a first layer of a first conductivity type and a second layer of a second conductivity type, which is of opposite polarity to the first conductivity type. The first layer has an edge region and a center region, the pn transition being provided between the first layer and the second layer. The second layer is more weakly doped in its edge region than in its center region, and the boundary surface of the pn transition at the edge region is non-parallel to the main chip plane.
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Goerlach Alfred
Lopez Maria Del Rocio Martin
Spitz Richard
Will Barbara
Chiu Tsz
Kenyon & Kenyon LLP
Robert & Bosch GmbH
Smith Zandra V.
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