Semiconductor substrate transfer apparatus and semiconductor...

Details Semiconductor substrate transfer apparatus and semiconductor... Semiconductor substrate transfer apparatus and semiconductor...

2006-06-01

2009-11-17

Rodríguez, Saúl J (Department: 3652)

Material or article handling

Device for emptying portable receptacle

Nongravity type

C414S217000

Reexamination Certificate

active

07618226

ABSTRACT:
A semiconductor substrate transfer apparatus for transferring semiconductor substrates from a first container to a second container, includes: multiple end effectors; at least one robot arm with which the multiple end effectors are independently rotatably joined; and a controller storing software including instructions to judge which end effector or end effectors in the multiple end effectors are to be selected based on a distribution status of substrates stored in the first and second containers and to rotate the selected end effector(s) for unloading a substrate or substrates from the first container and loading the substrate or substrates to the second container.

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