Semiconductor substrate, method of manufacturing the same,...

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate – On insulating substrate or layer

Reexamination Certificate

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C257SE33005, C257SE21090

Reexamination Certificate

active

11282784

ABSTRACT:
A semiconductor substrate is disclosed which comprises a first single crystal silicon layer, an insulator formed to partially cover one main surface of the first single crystal silicon layer, a second single crystal silicon layer formed to cover a region of the first single crystal silicon layer which is not covered with the insulator, and to cover an edge portion of the insulator adjacent to the region, and a non-single crystal silicon layer formed on the insulator, the interface between the non-single crystal silicon layer and the second single crystal silicon layer being positioned on the insulator.

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patent: 6531754 (2003-03-01), Nagano et al.
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patent: 5-75053 (1993-03-01), None
patent: 8-222625 (1996-08-01), None
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patent: 2000-223679 (2000-08-01), None

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