Semiconductor substrate and process for its production

Details Semiconductor substrate and process for its production Semiconductor substrate and process for its production

2005-10-11

2005-10-11

Jackson, Jerome (Department: 2815)

Active solid-state devices (e.g., transistors, solid-state diode

Test or calibration structure

C257S347000, C257S797000

Reexamination Certificate

active

06953948

ABSTRACT:
The present invention provides a semiconductor substrate comprising a semiconductor layer3formed on a supporting substrate1with interposition of an insulating layer2therebetween, wherein a mark is formed in a region other than a surface region of the semiconductor layer; and a process for producing the semiconductor substrate.

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