Semiconductor structure with improved on resistance and...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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Reexamination Certificate

active

11193725

ABSTRACT:
A lateral FET cell is formed in a body of semiconductor material. The lateral FET cell includes a super junction structure formed in a drift region between a drain contact and a body region. The super junction structure includes a plurality of spaced apart filled trenches bounding in part a multiplicity of striped doped regions having opposite or alternating conductivity types.

REFERENCES:
patent: 5294824 (1994-03-01), Okada
patent: 5353252 (1994-10-01), Hashimoto
patent: 6097063 (2000-08-01), Fujihira
patent: 6207994 (2001-03-01), Rumennik et al.
patent: 6410958 (2002-06-01), Usui et al.
patent: 6479352 (2002-11-01), Blanchard
patent: 6555873 (2003-04-01), Disney et al.
patent: 2003/0132450 (2003-07-01), Minato et al.
patent: 2004/0065934 (2004-04-01), Sridevan et al.
patent: 2007/0023855 (2007-02-01), Hossain et al.

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