Active solid-state devices (e.g. – transistors – solid-state diode – Physical configuration of semiconductor – Mesa structure
Patent
1998-05-08
2000-03-07
Saadat, Mahshid
Active solid-state devices (e.g., transistors, solid-state diode
Physical configuration of semiconductor
Mesa structure
257618, H01L 2906
Patent
active
060344172
ABSTRACT:
A semiconductor structure includes a first substrate portion having a surface and a first active region disposed in the first substrate portion. An insulator region is disposed on the first substrate portion outside of the first active region and extends out from the surface. A second substrate portion is disposed on the insulator region, and a second active region is disposed in the second substrate portion. Thus, by disposing a portion of the substrate on the isolation region, the usable substrate area is dramatically increased.
REFERENCES:
patent: 4171234 (1979-10-01), Nagata et al.
patent: 5338942 (1994-08-01), Nishida et al.
patent: 5656842 (1997-08-01), Iwamatsu et al.
Eckert II George C.
Micro)n Technology, Inc.
Saadat Mahshid
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